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THE SPECIFICATION

• Description

  Optical Coating Chamber

• Type

  Front Load Box Coater

• Chamber Diameter

  Φ750x990H

• Vacuum Pumping Syste

  Low Vacuum Pump
  - Oil Rotary Pump E2M275
  - Mechanical Booster Pump EH1200
  High Vacuum Pump
  - Oil Diffusion Pump MRV 22" 1Set
  - Cryo-Pump or Turbo Molec
  Optionsp
  - ular Pump

• Chamber Heating Syste

  Max Temperature
  - Oil Rotary Pump E2M275
  Type
  - Halogen Lamp
  Options
  - Micro-Sheathe Heater
  

• Valves

  Main Valve
  - 22" 1set
  Roughing Valve
  - NW40 Type 1set, 2 1/2" 1set
  Fore Line Valve
  - 2 1/2" 1set
  Vent Valve
  - NW25 Type 1set
  

• Substrate Holder Type

  Dome orlanetary,
  Rotation Speed 0 to 25 RPM

• Vacuum Measurement System

  GP-307(High Vacuum Sensor :
  1, Low Vacuum Sensor : 2)

• Optional

  - Thin film deposition controller
  - Optical monitor & Controlle
  - Ion beam source
  - Electron beam source
  - Poly coid (D/P, chamber)
  - Chiller
  - Touch screen control system
  - Others

• User Utility

  Power Consumption 380/220V
  3-ph AC 50/60Hz 30/40kW
  Compressed air supply pressure 5~8kgf/㎠
  Cooling water supply
  - Pressue
  - 2~3kgf/㎠
  - Temperature
  - 18 to 25℃
  

APPLICATION

• - GLASSES-AR, BBAR, RX lens
  - Color Filter-LCD, DLP Projection
  - Optical Dichroic Filter-Welding Filter, Laser Protector Filter
  - Band Pass Filter-Laser Window, Sensor Window, UV/IR Cut Filte
  - IR Cut Filter-CCD Camera, Mobile Phone Camera, Illuminator
  - Hydrophobic Coating
  - Metal Mirror, Color Glass, Lamp & Reflector
  - Polarization Beam Splitters-Beam Splitting, Spectrometry, DVD-RW